Mass Flowmeter Using a Multi-sensor Chip
نویسندگان
چکیده
We report here a novel two-mode mass flowmeter that can be operated in either thermal or differential pressure mode. By combining these two complementary operating principles, the performance can be improved significantly. This flowmeter is based on a multi-sensor chip that includes a 1-D array of shear stress, pressure and temperature sensors. The multi-sensor chip can also be employed in many other complicated channel flow studies. Extensive tests have been carried out on shear stress sensors to evaluate the effects of overheat ratio, channel height and gas properties.
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تاریخ انتشار 2001